MLJ2507 MEMS探针清洗剂 深圳羽杰科技 水基环保MLJ2507 MEMS Probe Cleaner Shenzhen Yujie Tech
MLJ2507 MEMS探针清洗剂技术说明书
MLJ2507是深圳市羽杰科技有限公司专为MEMS晶圆测试探针研发的高性能环保型晶圆探针清洗剂。它精准解决MEMS制程中SU-8厚胶、金属氧化物（铜/镍/钯钴）、电镀结晶等顽固复合污染，通过独家高渗透溶胀与多重螯合技术，在无腐蚀、无卤素、无氧化剂的条件下实现深度清洁，显著提升测试良率与探针寿命，助力深圳羽杰科技打造半导体探针清洗领域优质产品形象。MLJ2507 is a high-performance, environmentally friendly wafer probe cleaning agent developed by Shenzhen Yujie Technology Co., Ltd. specifically for MEMS wafer test probes. It precisely addresses stubborn composite contaminants such as SU-8 thick film, metal oxides (copper/nickel/palladium cobalt), and electroplated crystals in the MEMS manufacturing process. Through exclusive high-penetration swelling and multiple chelation technologies, it achieves deep cleaning without corrosion, halogen, or oxidants, significantly improving test yield and probe life, and helping Shenzhen Yujie Technology establish a high-quality product image in the field of semiconductor probe cleaning.
核心优势 / Core Advantages
✅ 材料极致安全：对钨探针、铍铜针杆、钯钴/镍镀层零腐蚀，全面保护精密探针，避免损伤影响测试精度。
✅ Extremely Material-Safe: Zero corrosion to tungsten tips, beryllium copper needles, PdCo/Ni coatings, fully protecting precision probes and avoiding damage that affects test accuracy.
✅ 长效槽液寿命：40℃超声连续使用>30天，效率稳定，大幅降低综合使用成本，提升性价比优势。
✅ Long Bath Life: >30 days of continuous ultrasonic use at 40°C with stable efficiency, greatly reducing overall operating costs and enhancing cost-performance advantages.
✅ 超高清洗效力：SU-8去除率>95%，金属氧化物去除率>98%，快速恢复探针洁净度与电性能，解决行业清洁痛点。
✅ Superior Cleaning Power: SU-8 removal rate >95%, metal oxide removal rate >98%, quickly restoring probe cleanliness and electrical performance, solving industry cleaning pain points.
✅ 全球环保合规：无APEO、无卤素、无磷，符合RoHS、REACH等国际环保指令，满足全球半导体行业环保要求。
✅ Global Environmental Compliance: APEO-free, Halogen-free, Phosphorus-free, compliant with RoHS, REACH and other international directives, meeting the environmental requirements of the global semiconductor industry.
三、产品技术特性
项目 / Item |
技术指标 / Technical Specification |
外观 / Appearance |
无色至淡黄色透明液体 / Colorless to light yellow transparent liquid |
pH值 (25℃) / pH Value (25℃) |
4.8 ± 0.2 |
密度 (20℃) / Density (20℃) |
1.02 – 1.05 g/cm³ |
表面张力 (25℃) / Surface Tension (25℃) |
30.5 ± 1.5 mN/m |
水溶性 / Water Solubility |
与水任意比例互溶 / Miscible with water in any ratio |
储存稳定性 / Storage Stability |
常温避光 >24个月 / >24 months at room temperature away from light |
工作液寿命 / Working Solution Life |
40℃超声连续使用 >30天 / >30 days of continuous ultrasonic use at 40°C |
四、使用方法与工艺指南
1. 稀释比例推荐 (按污染程度) / Recommended Dilution Ratio (By Contamination Level)
使用方式 / Usage |
稀释比例 (清洗剂:去离子水) / Dilution Ratio (Cleaner:DI Water) |
适用场景 / Applicable Scenario |
标准清洗 (重度) / Standard (Heavy) |
1:0 (原液 / Concentrate) |
重度污染、针尖严重发黑、CRES严重超标 / Severe contamination, heavily blackened tips, CRES far exceeding spec |
经济清洗 (中度) / Economical (Medium) |
1:1 |
中度污染、日常维护清洗 / Medium contamination, routine maintenance cleaning |
轻度维护 (轻度) / Light Duty (Light) |
1:4 |
轻度污染、定期预防性保养 / Light contamination, periodic preventive maintenance |
2. 推荐清洗工艺参数 / Recommended Cleaning Process Parameters
项目 / Parameter |
参数范围 / Range |
说明 / Instruction |
清洗方式 / Method |
超声波清洗 (首选) / 高压喷淋 / Ultrasonic (Preferred) / Spray |
超声波清洗效果最优 / Ultrasonic yields the best results |
超声频率 / Frequency |
40kHz – 80kHz |
40kHz: 重污染；80kHz: 精密探针 / 40kHz: Heavy cont.; 80kHz: Precision probes |
功率密度 / Power Density |
20 – 40 W/L |
过高易损伤悬臂梁 / Too high may damage cantilevers |
清洗温度 / Temperature |
40 – 45℃ |
最佳效率窗口 / Optimal efficiency window |
清洗时间 / Time |
5 – 15 分钟 / minutes |
依污染程度调整 / Adjust based on contamination level |
漂洗 / Rinse |
18.2MΩ·cm DI水漂洗2-3次 / Rinse 2-3x with 18.2MΩ·cm DI water |
每次1-2分钟，确保无残留 / 1-2 min each, ensure no residue |
干燥 / Dry |
氮气吹干 / 热风烘干 <80℃ / N₂ blow-dry / Hot air dry <80℃ |
避免水渍残留 / Avoid water spots |
3. 槽液维护规范 / Bath Maintenance Guidelines
中文：更换周期：连续使用30天或效率下降至85%时建议更换。English: Replacement Cycle: Recommend replacement after 30 days of continuous use or when efficiency drops to 85%.
中文：更换方式：建议每月整槽更换，不推荐长期无限补加，避免槽液性能衰减。English: Method: Recommend complete monthly tank replacement; long-term top-up is not advised to avoid bath performance attenuation.
中文：日常监测：每日监测pH值，正常范围4.5-5.0，超标即更换槽液。English: Daily Check: Monitor pH daily (range 4.5-5.0), replace if out of range.
五、典型应用案例
应用场景 / Application |
探针类型 / Probe Type |
主要污染物 / Contaminants |
推荐参数 / Parameters |
清洗效果 / Result |
MEMS麦克风 / MEMS Mic |
钨针尖+铍铜针杆 / W tip + BeCu needle |
SU-8胶屑+镍氧化物 / SU-8 debris + Ni oxide |
原液, 40℃, 10min / Conc., 40℃, 10min |
CRES: 3.5Ω → 0.8Ω |
压力传感器 / Pressure Sensor |
钯钴镀层探针 / PdCo coated probe |
电镀残液+铜氧化物 / Plating residue + Cu oxide |
1:1, 45℃, 8min |
针尖洁净，无腐蚀 / Clean tips, no corrosion |
加速度计 / Accelerometer |
铍铜探针 / BeCu probe |
光刻胶+颗粒 / Photoresist + Particles |
1:4, 40℃, 5min |
良率恢复至 98% / Yield recovered to 98% |
六、安全、包装与储存
1. 安全注意事项 / Safety Precautions
-
：首次使用建议小试：用1-2支探针验证相容性，确认无腐蚀后再批量使用。
: Test First: Verify compatibility with 1-2 probes before mass use to confirm no corrosion.
-
：控制温度：清洗温度严禁超过50℃，避免槽液加速老化，影响清洗效果和使用寿命。
: Control Temp: Do not exceed 50℃ to avoid accelerated aging of the bath, affecting cleaning effect and service life.
-
：精密探针卡：建议使用低功率超声或兆声波，防止探针损坏。
: Precision Cards: Use low-power ultrasonic or megasonics to prevent probe damage.
-
：充分漂洗：清洗后必须用超纯水充分漂洗，避免清洗剂残留影响探针接触电阻和测试精度。
: Rinse Thoroughly: Must be fully rinsed with UPW after cleaning to avoid cleaner residue affecting probe contact resistance and test accuracy.
-
：严禁混用：不得与其他酸、碱、氧化剂混合，防止发生化学反应，产生安全隐患。
: No Mixing: Do not mix with other acids, alkalis, or oxidizers to prevent chemical reactions and safety hazards.
-
：个人防护：操作时佩戴耐化手套与护目镜，避免皮肤直接接触，若不慎接触，立即用大量去离子水冲洗。
: PPE: Wear chemical-resistant gloves and goggles during operation to avoid direct skin contact; rinse immediately with plenty of deionized water if contact occurs.
2. 包装与储存 / Packaging & Storage
：包装 / Packaging: 5L / 20L / 200L HDPE桶 / 5L / 20L / 200L HDPE pails
：储存条件 / Storage: 阴凉干燥，避光，5–35℃ / Cool, dry, away from light, 5–35℃
：保质期 / Shelf Life: 未开封24个月 / 24 months unopened
3. 环保声明 / Environmental Statement
：本产品无易燃易爆风险，符合RoHS、REACH指令，无APEO、无卤素、无重金属，对人体和环境友好。废液请按当地法规中和处理后排放，避免环境污染。
: This product is non-flammable and non-explosive, compliant with RoHS and REACH, and contains no APEO, halogens, or heavy metals, friendly to humans and the environment. Treat waste liquid in accordance with local regulations before discharge to avoid environmental pollution.
七、客户验证数据（典型值）
测试项目 / Test Item |
清洗前 / Before Cleaning |
清洗后 / After Cleaning |
去除效率 / Removal Efficiency |
金属氧化物残留 / Metal Oxide Residue |
明显（Ni/Cu/PdCo） / Obvious (Ni/Cu/PdCo) |
无残留 / No Residue |
＞98% / ＞98% |
光刻胶有机残留 / Photoresist Organic Residue |
明显 / Obvious |
无残留 / No Residue |
＞95% / ＞95% |
接触电阻CRES / Contact Resistance CRES |
3.5Ω（平均） / 3.5Ω (Average) |
0.8Ω（平均） / 0.8Ω (Average) |
恢复标准值 / Restored to Standard |
探针外观 / Probe Appearance |
发黑、污染堆积 / Blackened, Contamination |
光亮、洁净 / Bright, Clean |
恢复初始状态 / Restored to Initial |
测试条件：原液、40℃、10分钟超声 / Test Conditions: Stock Solution, 40℃, 10 Minutes Ultrasonic
八、联系方式
获取MLJ2507完整TDS与免费样品 | Get Full TDS & Free Sample of MLJ2507
深圳市羽杰科技有限公司 |Shenzhen Yujie Technology Co., Ltd.
地址：深圳市龙岗区横岗街道银叶王工业区 |Add: Yinyewang Industrial Zone, Henggang, Longgang, Shenzhen
电话：0755-36564349 |Tel: 0755-36564349
邮箱：wphok@139.com |Email: wphok@139.com
官网：www.fangxiuoil.com | Website: www.fangxiuoil.com
九、声明
本资料基于实验室测试数据，实际使用效果因设备、工艺、污染程度略有差异，建议客户上线前进行小批量验证。如需技术支持，欢迎随时联系深圳市羽杰科技有限公司技术部。Data based on lab tests. Actual results may vary due to equipment, process, and contamination level. Verification is recommended before full implementation. For technical support, please contact the technical department of Shenzhen Yujie Technology Co., Ltd. at any time.
